Shape Optimization of a Capacitive Microswitch

نویسنده

  • Ádám Kovács
چکیده

1. Abstract A well designed capacitive micro-machined switch requires small electrostatic pull-in force to easy switch-on and high natural frequencies to fast switch-off. Since the change of geometrical parameters of the bridge (moving part of the switch) affects contrary to one of these aspects, one could search for a shape of the bridge to obtain optimum functioning. The paper deals with design optimization using linear beam and plate models verified by the finite element method.

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تاریخ انتشار 2005